- Home/
- Film SurveyIR - Grazing Angle FT-IR Microscope for Thin Film Character
Film SurveyIR - Grazing Angle FT-IR Microscope for Thin Film Characterization


Film SurveyIR™ is an indispensable tool for investigators in the telecommunications, electronics and semiconductor industries for quality assurance and thin film (< 1 µm thickness) characterization and for researchers developing new thin film materials.
Application Areas
-
Thin Film Materials Research and Development
-
Thin Film Contaminant / Defect Analysis
-
Film Thickness Measurement and Uniformity
-
Lubrication / Oxidation
-
Surface Modification / Characterization
-
Monolayers on Surfaces
-
Nanomaterials
-
Organic Conductors / Semiconductors
-
Organic Light Emitting Diodes (OLEDS)
Film SurveyIR™ Specifications
Externally mounted, interfacing to FT-IR output beam
Thin film analysis of species on metal, semiconductor, or dielectric substrates
Microscope-mounted, liquid nitrogen cooled MCT detector provides maximum sensitivity
Manual X, Y, Z focus and specimen manipulation
Microscope frame design accommodates specimen from 1” x 1” coupons to 12” disks
External reflection and Ge ATR IR incident angle: 60° - 85°
Nominal external reflection mode infrared spot size at specimen:
250, 167, 133, 107, 67, and 40 µm
Germanium ATR facilitates thin film analysis on dielectric substrates:
Nominal ATR contact size on specimen: 250, 167, 133, 107, 67, and 40 µm
Stage mounted contact alert / force readout for ATR measurements
On-board, user selectable IR polarizer maximizes absorption intensity and facilitates orientation studies
eSpot™ software controls microscope functions, illumination modes, and live image observation, image capture, documentation, analysis, and storage.
On board 5MP video camera facilitates high resolution images and video capture
Microscope optical magnification in viewing mode results in .77µm/pixel in specimen plane
Viewing survey mode for ATR analysis facilitates specimen targeting